Publication

Microchannel plate and its manufacturing method

2011
Patents

Abstract

The present invention relates to a microchannel plate (1) having an array of channels (5), wherein said microchannel plate comprises a substrate (2) and, deposited on said substrate, a hydrogenated amorphous silicon film (3) having a thickness comprised between 50 [mu]m and 200 [mu]m, preferably comprised between 80 [mu]m and 120 [mu]m, said film comprising said array of channels (5). Preferably, the substrate (2) is an integrated circuit comprising an internal electronic readout circuit and pixilated collection electrodes (8), and the film (3) is integrated on said substrate (2). The channels (5) may be formed by a Deep Reactive Ion Etching (DRIE) process.

Official source

https://infoscience.epfl.ch/entities/publication/39742b54-0a2b-4663-9893-d16f2355b278

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2011
Patents

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/39742b54-0a2b-4663-9893-d16f2355b278

About this result

Related concepts (32)

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Reactive-ion etching

Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it. A typical (parallel plate) RIE system consists of a cylindrical vacuum chamber, with a wafer platter situated in the bottom portion of the chamber.

Film

A film also called a movie, motion picture, moving picture, picture, photoplay or (slang) flick is a work of visual art that simulates experiences and otherwise communicates ideas, stories, perceptions, feelings, beauty, or atmosphere through the use of moving images. These images are generally accompanied by sound and, more rarely, other sensory stimulations. The word "cinema", short for cinematography, is often used to refer to filmmaking and the film industry, and the art form that is the result of it.

Related publications (32)

Microchannel plate and its manufacturing method

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