Publication

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Seniz Esra Küçük
2021
Conference Papers

Abstract

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high frequency and large bandwidth 5G filter applications.

Official source

https://infoscience.epfl.ch/entities/publication/38aa72e0-bc14-4011-b231-34092de8b0d6

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FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

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