Publication

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

2016
Posters

Abstract

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.

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2016
Posters

Abstract

Official source

Related concepts (20)

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Silicon nitride

Silicon nitride is a chemical compound of the elements silicon and nitrogen. Si3N4 (Trisilicon tetranitride) is the most thermodynamically stable and commercially important of the silicon nitrides, and the term ′′Silicon nitride′′ commonly refers to this specific composition. It is a white, high-melting-point solid that is relatively chemically inert, being attacked by dilute HF and hot H3PO4. It is very hard (8.5 on the mohs scale). It has a high thermal stability with strong optical nonlinearities for all-optical applications.

Nitride

In chemistry, a nitride is an inorganic compound of nitrogen. The "nitride" anion, N3- ion, is very elusive but compounds of nitride are numerous, although rarely naturally occurring. Some nitrides have a found applications, such as wear-resistant coatings (e.g., titanium nitride, TiN), hard ceramic materials (e.g., silicon nitride, Si3N4), and semiconductors (e.g., gallium nitride, GaN). The development of GaN-based light emitting diodes was recognized by the 2014 Nobel Prize in Physics.

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Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

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