Publication

Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

2005
Talks

Abstract

Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are not suitable at high current densities, probes with an entire metallic tip form a solution. We present the fabrication and characterisation of hybrid SPM probes with fully metallic cantilever and tip. One method is based on a backside opening etch in KOH solution. The other method uses a dry under-etch probe release. Fully metallic cantilevers with integrated tips of tungsten (W) and Pt have been fabricated. The body of the probes consists of the photopolymer SU-8. A tip sharpness controlling method is presented.

Official source

https://infoscience.epfl.ch/entities/publication/2d1f7c49-c932-403a-a9f0-f5e2bcd0799f

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2005
Talks

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/2d1f7c49-c932-403a-a9f0-f5e2bcd0799f

About this result

Related concepts (29)

Scanning electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.

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Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

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Related publications (6)

Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

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