Publication

Fabrication and Characterization of MEMS Piezoelectric Accelerometers

2020
Student Projects

Abstract

In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricated and known fabrication issues were successfully avoided. A first characterization of the fabricated devices was done, and results show a strong agreement with the FEM simulations done during and before this project. FEM simulations were done for alternative designs and showed a possibility to almost double the charge generation of the accelerometers.

Official source

https://infoscience.epfl.ch/entities/publication/295ed541-7672-477d-b4a1-f634824f8a85

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2020
Student Projects

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/295ed541-7672-477d-b4a1-f634824f8a85

About this result

Related concepts (32)

Accelerometer

An accelerometer is a tool that measures proper acceleration. Proper acceleration is the acceleration (the rate of change of velocity) of a body in its own instantaneous rest frame; this is different from coordinate acceleration, which is acceleration in a fixed coordinate system. For example, an accelerometer at rest on the surface of the Earth will measure an acceleration due to Earth's gravity, straight upwards (by definition) of g ≈ 9.81 m/s2. By contrast, accelerometers in free fall (falling toward the center of the Earth at a rate of about 9.

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Metal fabrication

Metal fabrication is the creation of metal structures by cutting, bending and assembling processes. It is a value-added process involving the creation of machines, parts, and structures from various raw materials. Typically, a fabrication shop bids on a job, usually based on engineering drawings, and if awarded the contract, builds the product. Large fab shops employ a multitude of value-added processes, including welding, cutting, forming and machining. As with other manufacturing processes, both human labor and automation are commonly used.

Related publications (27)

Fabrication and Characterization of MEMS Piezoelectric Accelerometers

Chat with Graph Search

Digisen: analyser les usages du numérique par la jeunesse au sénégal à travers les inégalités d’accès aux technologies

Optimization of the Channel Fabrication Process for Suspended Microchannel Resonators Semester project report Advanced NEMS Laboratory Student Name Student Number

Implementation of an Electrostatic Device for Investigation of Electric Fields on Cells