High-power modular LED-based illumination systems for mask-aligner lithography

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Related publications (28)

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Wilfried Noell, Toralf Scharf, Chen Yan, Raoul Kirner, Andreas Vetter

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is opti ...

2019

Optical-stack optimization for improved SPAD photon detection efficiency

Claudio Bruschini, Rolando Ferrini, Edoardo Charbon, Frédéric Zanella, Marc Schnieper, Scott Anthony Lindner, Ivan Michel Antolovic, Arin Can Ülkü, Ekin Kizilkan

Single-photon avalanche diodes (SPADs) are direct photon-to-digital detectors that enable scalable arrays with Poisson-limited signal-to-noise ratio and picosecond timing resolution. However, SPAD detectors require a guard-ring structure to prevent lateral ...

2019

Electroluminescence of Single InGaN/GaN Micropyramids

Hua Zhang, Gwénolé Jean Jacopin

The results of the fabrication of technological regimes of formation and the study of the optical properties of light emitting diodes (LED) micropyramids based on InGaN/GaN are presented. The structures were formed by the method of Metalorganic vapour-phas ...

PLEIADES PUBLISHING INC2019

Elucidating the role of the InGaN UL in the efficiency of InGaN based light-emitting diodes

Camille Haller

Blue III-nitride light-emitting diodes (LEDs) are widely used nowadays in solid-state lighting, as white light can be produced by combining yellow phosphors and blue LEDs. This technology has the advantage to have a higher luminous efficiency than incandes ...

EPFL2019

Characterization and Modelling of the Emission Zone and Exciton Dynamics in Doped Organic Light-Emitting Diodes

Markus Regnat

Only recently organic light-emitting diode (OLED) technology has successfully managed the transition from research labs into the consumer market, taking a 60% share of the global mobile display market in 2018. The latest discovery of thermally activated de ...

EPFL2019

Magic Prints: Image-Changing Prints Observed under Visible and 365 nm UV Light

Petar Pjanic, Marjan Shahpaski

In this paper we propose a novel layered-printing method consisting of superposed visible cmy and invisible fluorescent ultraviolet (UV) rgb inks. Our approach can be used to generate a variety of visual color-alteration effects such as revealing two compl ...

I S & T-SOC IMAGING SCIENCE TECHNOLOGY2019

High power modular LED-based illumination system for lithography applications

Hans Peter Herzig, Wilfried Noell, Marcel Groccia, Toralf Scharf, Johana Bernasconi, Raoul Kirner

Mask-aligner lithography is a technology used to transfer patterns with critical dimensions in the micrometer range from below 1 micron for contact printing to a dozen of microns in proximity printing. This technology is widely used in the fabrication of M ...

2018

High power ultraviolet LED illumination systems: coherence properties and applications in photolithography

Johana Bernasconi

Mask-aligner photolithography is a technology used to replicate patterns from a mask to a photosensitive substrate. It is widely used in the fabrication of MEMS and micro-optical components, and for other applications with dimensions in the micrometer rang ...

EPFL2018

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