YBAR resonators for biosensing - Improving the fabrication of channels in silicon

This student project is the continuation of a previous semester project conducted at the Advanced NEMS (ANEMS) Laboratory last semester, at EPFL [1]. The project investigated the fabrication of channels in silicon and found a way to assemble the silicon chip and the PDMS lid, which was a major challenge. It also concluded that chips with passively driven fluidics did not work due to the hydrophobic properties resulting from the etching process and, from then on, only actively driven fluidics chips (with external actuators) were studied [1]. The current aim is to continue to build on the results of the last project by focusing solely on the active chips, which use a syringe to push the fluid. The fabrication of a more advanced model with holes passing through the wafer will be pursued. Finally, we will try out different ideas throughout the semester to improve and test the design, understand its limitations and suggest ideas for future improvements.