SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

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Related publications (28)

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Yves Bellouard, Olivier Bernard, Benedikt Hermann, Luca Muscarella

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore t ...

2023

Bringing casting to microfabrication: processing and deformation of microcastings

Luciano Borasi

This work extends the range of pathways for the production of metallic microcomponents by downscaling metal casting. This is accomplished by using either of two different molding techniques, namely femtosecond laser micromachining or lithographic silicon m ...

EPFL2023

III-V Nitride Semiconductors Deposited At Low Temperature For Photovoltaic Applications

Jonathan Emanuel Thomet

This thesis reports on the study and use of low temperature processes for the deposition of indium gallium nitride (InGaN) thin films in order to alleviate some of the present drawbacks of its monolitic deposition on silicon for photovoltaic applications. ...

EPFL2023

Integrated Backward Second-Harmonic Generation through Optically Induced Quasi-Phase-Matching

Camille Sophie Brès, Jianqi Hu, Edgars Nitiss, Ozan Yakar

Quasi-phase-matching for efficient backward second-harmonic generation requires sub-μm poling periods, a nontrivial fabrication feat. For the first time, we report integrated first-order quasiphase-matched backward second-harmonic generation enabled by see ...

2023

Flexible Silk-Based Graphene Bioelectronics For Wearable Multimodal Physiological Monitoring

Ata Jedari Golparvar

We introduce a skin-inspired epidermal bioelectronic patch (EBP) with unprecedented integration of graphene on silk with a facile and cost-effective fabrication process, excluding complex ink formulation. We advance the state-of-the-art by directly screen- ...

IEEE2023

Hybrid lithium niobate-on-silicon nitride platform for mid-IR supercontinuum generation

Tobias Kippenberg, Mikhail Churaev

Integrated optics has shown itself very convenient for exploiting nonlinear processes as it results in high confinement factor, freedom of dispersion engineering and compactness. However, the choice of materials is crucial for the development of nonlinear ...

SPIE-INT SOC OPTICAL ENGINEERING2023

Selective Growth of van der Waals Heterostructures Enabled by Electron-Beam Irradiation

Aleksandra Radenovic, Michal Daniel Macha

Van der Waals heterostructures (vdWHSs) enable the fabricationof complex electronic devices based on two-dimensional (2D) materials.Ideally, these vdWHSs should be fabricated in a scalable and repeatableway and only in the specific areas of the substrate t ...

AMER CHEMICAL SOC2023

A versatile platform for graphene nanoribbon synthesis, electronic decoupling, and spin polarized measurements

Donat Fabian Natterer, Johannes Schwenk

The on-surface synthesis of nano-graphenes has led the charge in prototyping structures with perspectives beyond silicon-based technology. Following reports of open-shell systems in graphene-nanoribbons (GNRs), a flurry of research activity was directed at ...

ROYAL SOC CHEMISTRY2023

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