Publication

Selective copper film growth on platinum clusters

Hubert van den Bergh
1989
Journal Articles

Abstract

Two-step spatially delineated growth of copper lines from a solid copper formate layer on a surface is demonstrated. In the first step, a localized platinum film, less than 10 .ANG. high, is deposited. Subsequently the whole surface is covered by a few microns of Cu(HCOO)2.2H2O. Heating to about 70 Deg causes the formate to decomp. exclusively where the surface had been seeded with the thin film of platinum clusters. Line resistivities of about twice that of pure bulk copper can be obtained in this way. In principle this method should permit direct writing of metal stripes at very high speeds and good spatial resoln.

Official source

https://infoscience.epfl.ch/entities/publication/1e7af3a9-6a0f-4a80-9073-19cbf8b0393b

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Hubert van den Bergh
1989
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/1e7af3a9-6a0f-4a80-9073-19cbf8b0393b

About this result

Related concepts (14)

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Related publications (1)

Selective copper film growth on platinum clusters

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Propriétés électriques et optiques de couches minces de WS2 et MoS2 en vue d'applications photovoltaïques