Publication

Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

Rolf Wüthrich
2009
Journal Articles

Abstract

Spark-assisted chemical engraving (SACE) is a flexible, simple and inexpensive method for machining electrically non-conductive materials. SACE is particularly interesting because of the high drilling speed that can be achieved compared to other micromachining technologies. In this paper, the issue of drilling speed decreasing from 100 mu m s(-1) to 10 mu m s(-1) for micro-hole depths more than 200-300 mu m is analyzed. To understand better the material removal mechanism, with the target to eliminate this limit, a model for the material removal mechanism as a hybrid mechanism combining local heating and chemical etching is presented and compared with experimental data. The comparison between the model and experiment allowed the estimation of the machining temperature to be around 600 degrees C.

Official source

https://infoscience.epfl.ch/entities/publication/1aa04a6a-d90e-4cc6-b036-793c1ac5b3ad

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Rolf Wüthrich
2009
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/1aa04a6a-d90e-4cc6-b036-793c1ac5b3ad

About this result

Related concepts (23)

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

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Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

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