Publication

RF MEMS Shunt Capacitive Switches Using AlN Compared to Si3N4 Dielectric

Mihai Adrian Ionescu
2012
Journal Articles

Abstract

RF microelectromechanical systems (MEMS) capacitive switches for two different dielectrics, aluminum nitride (AlN) and silicon nitride (Si3N4), are presented. The switches have been characterized and compared in terms of DC and RF performance (5-40 GHz). Switches based on AlN have higher down-state capacitance for similar dielectric thicknesses and provide better isolation and smaller insertion losses compared to Si3N4 switches. Experiments were carried out on RF MEMS switches with stiffening bars to prevent membrane deformation due to residual stress and with different spring and meander-type anchor designs. For a similar to 300-nm dielectric thickness, an air gap of 2.3 mu m and identical spring-type designs, the AlN switches systematically show an improvement in the isolation by more than-12 dB (-35.8 dB versus -23.7 dB) and a better insertion loss (-0.68 dB versus -0.90 dB) at 40 GHz compared to Si3N4. DC measurements show small leakage current densities for both dielectrics (

Official source

https://infoscience.epfl.ch/entities/publication/18715af7-63e8-4a59-84da-1e39f7fcdf02

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Mihai Adrian Ionescu
2012
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/18715af7-63e8-4a59-84da-1e39f7fcdf02

About this result

Related concepts (32)

Silicon nitride

Silicon nitride is a chemical compound of the elements silicon and nitrogen. Si3N4 (Trisilicon tetranitride) is the most thermodynamically stable and commercially important of the silicon nitrides, and the term ′′Silicon nitride′′ commonly refers to this specific composition. It is a white, high-melting-point solid that is relatively chemically inert, being attacked by dilute HF and hot H3PO4. It is very hard (8.5 on the mohs scale). It has a high thermal stability with strong optical nonlinearities for all-optical applications.

Switch

In electrical engineering, a switch is an electrical component that can disconnect or connect the conducting path in an electrical circuit, interrupting the electric current or diverting it from one conductor to another. The most common type of switch is an electromechanical device consisting of one or more sets of movable electrical contacts connected to external circuits. When a pair of contacts is touching current can pass between them, while when the contacts are separated no current can flow.

Crossbar switch

In electronics and telecommunications, a crossbar switch (cross-point switch, matrix switch) is a collection of switches arranged in a matrix configuration. A crossbar switch has multiple input and output lines that form a crossed pattern of interconnecting lines between which a connection may be established by closing a switch located at each intersection, the elements of the matrix. Originally, a crossbar switch consisted literally of crossing metal bars that provided the input and output paths.

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