Publication

Micromachined PZT thin film actuators for micromotors

Nava Setter, Paul Muralt, Thomas Maeder, Roland Luthier
1995
Journal Articles

Abstract

We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a diameter of 4 mm. The amplitudes of the membrane deflections are as large as 800 nm/V at the first resonance (26 kHz), and 60 nm/V at 1 Hz. The operation of the motor was obtained at 1 to 3 Vrms, with speeds of up to 200 rpm at 1.1 Vrms and torques of 35 nNm at 2.5 Vrms and 1mN force between rotor and stator. A long time test of 150 h showed no degradation of the motor performance.

Official source

https://infoscience.epfl.ch/entities/publication/18448184-637c-4081-86b7-af035aa9be98

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Nava Setter, Paul Muralt, Thomas Maeder, Roland Luthier
1995
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/18448184-637c-4081-86b7-af035aa9be98

About this result

Related concepts (19)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Thin-film bulk acoustic resonator

A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

Lead zirconate titanate

Lead zirconate titanate, also called lead zirconium titanate and commonly abbreviated as PZT, is an inorganic compound with the chemical formula It is a ceramic perovskite material that shows a marked piezoelectric effect, meaning that the compound changes shape when an electric field is applied. It is used in a number of practical applications such as ultrasonic transducers and piezoelectric resonators. It is a white to off-white solid. Lead zirconium titanate was first developed around 1952 at the Tokyo Institute of Technology.

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Micromachined PZT thin film actuators for micromotors

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