Publication

AlScN-on-SiC Surface Acoustic Wave Resonators and Filters above 4 GHz

2026

Abstract

With the continuous rise of the carrier frequencies in wireless systems, new material and design strategies enabling frequency scaling for surface acoustic wave resonator technology are required. We report AlScN-on-SiC Sezawa SAW resonators with resonances above 4 GHz. In previously demonstrated AlScN-based SAW resonators, the effective electromechanical coupling coefficient (k2eff) limited the bandwidth potential. We show that by integrating a patterned floating bottom electrode, the transduction efficiency can be enhanced compared to standard, IDT-only architectures. With a floating bottom electrode, we demonstrate Sezawa SAW resonators achieving a k2eff of 10.8%. In addition, we experimentally demonstrate filters with center frequencies in the 5–6 GHz range with 4–5% fractional bandwidth and a minimum insertion loss of 1 dB.

Official source

https://infoscience.epfl.ch/entities/publication/1775f96d-e95e-4d78-b207-757aabe9c4eb

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2026

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/1775f96d-e95e-4d78-b207-757aabe9c4eb

About this result

Related concepts (32)

Frequency modulation

Frequency modulation (FM) is the encoding of information in a carrier wave by varying the instantaneous frequency of the wave. The technology is used in telecommunications, radio broadcasting, signal processing, and computing. In analog frequency modulation, such as radio broadcasting, of an audio signal representing voice or music, the instantaneous frequency deviation, i.e. the difference between the frequency of the carrier and its center frequency, has a functional relation to the modulating signal amplitude.

Carrier wave

In telecommunications, a carrier wave, carrier signal, or just carrier, is a waveform (usually sinusoidal) that is modulated (modified) with an information-bearing signal (called the message signal or modulation signal) for the purpose of conveying information. This carrier wave usually has a much higher frequency than the message signal does. This is because it is impractical to transmit signals with low frequencies.

Radio frequency

Radio frequency (RF) is the oscillation rate of an alternating electric current or voltage or of a magnetic, electric or electromagnetic field or mechanical system in the frequency range from around 20kHz to around 300GHz. This is roughly between the upper limit of audio frequencies and the lower limit of infrared frequencies. These are the frequencies at which energy from an oscillating current can radiate off a conductor into space as radio waves, so they are used in radio technology, among other uses.

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AlScN-on-SiC Surface Acoustic Wave Resonators and Filters above 4 GHz

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