Flexure-based planar xy transition table

Flexure mechanism (1) comprising:- an end effector (3) arranged to be able to move in a first plane (XY);- an intermediate stage (7) linked to said end effector (3) by means of at least three first beams (5) extending substantially perpendicular to said first plane (XY) when the flexure mechanism (1) is in an unstressed state, said intermediate stage (7) being arranged to at least translate parallel to said first plane (XY);- a first fixed element (11) linked to said intermediate stage (5) by means of at least three second beams (9) extending substantially perpendicular to said first plane (XY) when the flexure mechanism (1) is in an unstressed state;- a coupling arrangement (13, 13a, 13b; 13c) linked to said end effector (3), to said intermediate stage (7), and to a fixed element (11, 15,29), said coupling arrangement (13, 13a, 13b; 13c) being arranged so as to substantially prevent said end effector (3) from displacing perpendicular to said first plane (XY).