Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

About
Privacy
Disclaimer

Graph Chatbot

Related publications (29)

Design of Ductile Rare-Earth-Free Magnesium Alloys

William Curtin, Zhaoxuan Wu, Binglun Yin, Rasool Ahmad

Pure Mg has low ductility due to a transition of < c+a > pyramidal dislocations to a sessile basal-oriented structure. Dilute alloying generally improves ductility. Enhancement of pyramidal cross-slip from the lower-energy pyramidal II plane to the higher- ...

SPRINGER INTERNATIONAL PUBLISHING AG2020

Colorimetry of Luminescent Lanthanide Complexes

Anne-Sophie Chauvin, Julien Alexandre Andres

Europium, terbium, dysprosium, and samarium are the main trivalent lanthanide ions emitting in the visible spectrum. In this work, the potential of these ions for colorimetric applications and colour reproduction was studied. The conversion of spectral dat ...

2020

Comparison of high density and nitrogen seeded detachment using SOLPS-ITER simulations of the tokamak a configuration variable

Basil Duval, Holger Reimerdes, Christian Gabriel Theiler, Hugo De Oliveira, Kevin Henricus Annemarie Verhaegh, Mirko Wensing, Lorenzo Martinelli

First of a kind SOLPS-ITER simulations on tokamak a configuration variable (TCV) that include nitrogen have been performed to model recent nitrogen seeded detachment experiments. Based on spectroscopic measurements, a nitrogen recycling coefficient R-p(N) ...

2020

Interface-Dominated Time-Dependent Behavior of Poled Poly(Vinylidene Fluoride–Trifluoroethylene)/Barium Titanate Composites

Dragan Damjanovic, Yves Leterrier, Véronique Michaud, Sara Dalle Vacche

Composites in which particles of ferroelectric ceramic phase are randomly dispersed in a polymeric matrix are of interest because of flexibility, conformability, and ease of processing. However, their piezoelectric properties are rather low, unless very hi ...

2020

Plasma-enhanced atomic layer deposition of nickel nanotubes with low resistivity and coherent magnetization dynamics for 3D spintronics

Anna Fontcuberta i Morral, Dirk Grundler, Maria Carmen Giordano, Julien Gay, Simon Robert Escobar Steinvall

We report plasma-enhanced atomic layer deposition (ALD) to prepare conformal nickel thin films and nanotubes by using nickelocene as a precursor, water as the oxidant agent and an in-cycle plasma enhanced reduction step with hydrogen. The optimized ALD pul ...

2020

Sensing the Spin of an Individual Ce Adatom

Wolf-Dieter Schneider, Markus Ternes

The magnetic moment of rare earth elements originates from electrons in the partially filled 4f orbitals. Accessing this moment electrically by scanning tunneling spectroscopy is hampered by shielding of outerlying orbitals. Here, we show that we can detec ...

AMER PHYSICAL SOC2020

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Clemens Benedict Nyffeler, Stefan Mertin, Andrea Mazzalai

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Paul Muralt, Luis Guillermo Villanueva Torrijo, Andrea Lozzi

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

2019

Page 2 of 2