Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

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This data set contains the data collected during the FNS project Green Piezo (Grant no. 179064) in association with the recent publication entitled “Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper ...

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Flexure-based mechanisms have become state-of-the-art solutions for the design of high-precision mechanisms, free from friction wear, backlash, and lubrication. These properties which are necessary for applications in ultraclean or harsh environments, neve ...

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

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