Publication

Cubic millimeter power inductor fabricated in batch-type wafer technology

Martinus Adela Maria Gijs, Menouer Saidani
2003
Journal Articles

Abstract

A hybrid technology for the realization of three-dimensional (3-D) miniaturized power inductors is presented. Our devices consist of planar Cu coils on polyimide substrates, and mm-size ferrite magnetic cores, obtained by three-dimensional micro-patterning of ferrite wafers using powder blasting. The coils are realized using an in-house developed high-resolution polyimide spinning and Cu electroplating process. Winding widths down to 5 um have been obtained and total device volumes are ranging between 1.5 and 10 mm3. Inductive and resistive properties are characterized as a function of frequency; inductance values in the 100 uH range have been obtained.

Official source

https://infoscience.epfl.ch/entities/publication/061b729f-05b9-45a6-907e-ee85fd3c023b

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Martinus Adela Maria Gijs, Menouer Saidani
2003
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/061b729f-05b9-45a6-907e-ee85fd3c023b

About this result

Related concepts (32)

Inductor

An inductor, also called a coil, choke, or reactor, is a passive two-terminal electrical component that stores energy in a magnetic field when electric current flows through it. An inductor typically consists of an insulated wire wound into a coil. When the current flowing through the coil changes, the time-varying magnetic field induces an electromotive force (emf) (voltage) in the conductor, described by Faraday's law of induction. According to Lenz's law, the induced voltage has a polarity (direction) which opposes the change in current that created it.

Inductance

Inductance is the tendency of an electrical conductor to oppose a change in the electric current flowing through it. The flow of electric current creates a magnetic field around the conductor. The field strength depends on the magnitude of the current, and follows any changes in current. From Faraday's law of induction, any change in magnetic field through a circuit induces an electromotive force (EMF) (voltage) in the conductors, a process known as electromagnetic induction.

Gyrator

A gyrator is a passive, linear, lossless, two-port electrical network element proposed in 1948 by Bernard D. H. Tellegen as a hypothetical fifth linear element after the resistor, capacitor, inductor and ideal transformer. Unlike the four conventional elements, the gyrator is non-reciprocal. Gyrators permit network realizations of two-(or-more)-port devices which cannot be realized with just the conventional four elements. In particular, gyrators make possible network realizations of isolators and circulators.

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Cubic millimeter power inductor fabricated in batch-type wafer technology

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