5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

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This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...

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This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...

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5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

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