Publication

IMPROVED LARGE-AREA AND HIGH-DENSITY NANOSTENCIL LITHOGRAPHY

2006
Reports

Abstract

Patterning of micro- and nanometer scale structures by means of nanostencils (shadow masks) is increasingly being used as a simple, clean and low-cost alternative to photolithography. Currently, large area pattern transfer using nanostencil lithography is limited by the mechanical stability of the shadow-mask membrane itself. The reason is that the deposited material induces undesirable stress in the membrane causing excessive bending or breakage and consequent loss in dimensional control. We have developed improved nanostencils with in-situ, local stabilization structures for increased moment of inertia, I. SEM images of membrane structures after Cr deposition are shown for the unstabilized and Si-supported membrane structures. It is confirmed that the membrane stabilization structures significantly reduces out-of-plane deformation of the membrane.

Official source

https://infoscience.epfl.ch/entities/publication/0469d6a5-32eb-4d13-93e6-5d5af0eb7a70

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chat

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0469d6a5-32eb-4d13-93e6-5d5af0eb7a70

About this result

Related concepts (31)

Membrane

A membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Biological membranes include cell membranes (outer coverings of cells or organelles that allow passage of certain constituents); nuclear membranes, which cover a cell nucleus; and tissue membranes, such as mucosae and serosae.

Cell membrane

The cell membrane (also known as the plasma membrane or cytoplasmic membrane, and historically referred to as the plasmalemma) is a biological membrane that separates and protects the interior of a cell from the outside environment (the extracellular space). The cell membrane consists of a lipid bilayer, made up of two layers of phospholipids with cholesterols (a lipid component) interspersed between them, maintaining appropriate membrane fluidity at various temperatures.

Membrane technology

Membrane technology encompasses the scientific processes used in the construction and application of membranes. Membranes are used to facilitate the transport or rejection of substances between mediums, and the mechanical separation of gas and liquid streams. In the simplest case, filtration is achieved when the pores of the membrane are smaller than the diameter of the undesired substance, such as a harmful microorganism.

Related publications (29)

IMPROVED LARGE-AREA AND HIGH-DENSITY NANOSTENCIL LITHOGRAPHY

Chat with Graph Search

Machine Learning-Assisted Quantification of Organelle Abundance

A microfluidic platform for whole-membrane integrity profiling in live neuronal cells

A microfluidic platform for whole-membrane integrity profiling in live neuronal cells