Publication

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Vahid Fakhfouri
2006
Conference Papers

Abstract

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-1000μm-wide molds were used to confine a liquid precursor of SiC/Si3N4 based ceramics on the sacrificial layer that enables the detachment of the green body before the pyrolysis step at 1000°C. The final ceramic cantilever has dimensions ranging from 100-500um x 1-2mm x 50um and a smooth surface. Details of the processing, structural and material characterization such as Dynamic Rheological and Thermogravimetric Analysis under UV will be presented and compared to those found in the literature.

Official source

https://infoscience.epfl.ch/entities/publication/041edc71-3ef9-4dd5-93e3-91ebe4f830b8

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Vahid Fakhfouri
2006
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/041edc71-3ef9-4dd5-93e3-91ebe4f830b8

About this result

Related concepts (32)

Thermogravimetric analysis

Thermogravimetric analysis or thermal gravimetric analysis (TGA) is a method of thermal analysis in which the mass of a sample is measured over time as the temperature changes. This measurement provides information about physical phenomena, such as phase transitions, absorption, adsorption and desorption; as well as chemical phenomena including chemisorptions, thermal decomposition, and solid-gas reactions (e.g., oxidation or reduction). Thermogravimetric analysis (TGA) is conducted on an instrument referred to as a thermogravimetric analyzer.

Thermal analysis

Thermal analysis is a branch of materials science where the properties of materials are studied as they change with temperature.

Ceramic

A ceramic is any of the various hard, brittle, heat-resistant, and corrosion-resistant materials made by shaping and then firing an inorganic, nonmetallic material, such as clay, at a high temperature. Common examples are earthenware, porcelain, and brick. The earliest ceramics made by humans were pottery objects (pots, vessels, or vases) or figurines made from clay, either by itself or mixed with other materials like silica, hardened and sintered in fire.

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Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

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