Publication

Processing of sol-gel PZT films for microactuators

Nava Setter
1994
Conference Papers

Abstract

Sol-gel derived lead zirconate titanate (PZT) thin films are being investigated for micromechanical applications. A synthesis technique which involves the spin coating of several thin layers followed by rapid thermal annealing to crystallize the perovskite phase and repetition to achieve thicker films is described. Methods of improving the PZT-PZT interfaces between subsequently annealed layers are described. Specifically, the effects of introducing thin (≈ 15 nm) Pb or Ti-rich layers at the PZT-PZT interfaces were investigated by transmission electron microscopy (TEM). Both the Pb and Ti-rich interlayers are shown to yield films of improved microstructure compared to films prepared without such compositional modifications.

Official source

https://infoscience.epfl.ch/entities/publication/0259ff81-6721-4ad5-b135-e779745e372a

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Nava Setter
1994
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/0259ff81-6721-4ad5-b135-e779745e372a

About this result

Related concepts (24)

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Thin-film solar cell

Thin-film solar cells are made by depositing one or more thin layers (thin films or TFs) of photovoltaic material onto a substrate, such as glass, plastic or metal. Thin-film solar cells are typically a few nanometers (nm) to a few microns (μm) thick–much thinner than the wafers used in conventional crystalline silicon (c-Si) based solar cells, which can be up to 200 μm thick. Thin-film solar cells are commercially used in several technologies, including cadmium telluride (CdTe), copper indium gallium diselenide (CIGS), and amorphous thin-film silicon (a-Si, TF-Si).

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Related publications (31)

Processing of sol-gel PZT films for microactuators

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