Cu-Mn-Dy resistive thin films were prepared on glass and Al2O3 substrates, which was achieved by co-sputtering the Cu-Mn alloy and dysprosium targets. The effects of the addition of dysprosium on the electrical properties and microstructures of annealed Cu ...
In this study, SiC ceramic substrates were prepared with 99.5% silicon carbide powders which were came from waste silicon mud during the manufacturing process of solar cells. It is found that a SiO2 layer with 50 nm in thickness is present on the SiC surfa ...
In this study, we fabricated thin-film resistors using CuMn and yttrium targets by DC/RF magnetron cosputtering. CuMnY-resistive thin films were deposited onto glass and Al2O3 substrates. The electrical properties and microstructures of CuMn alloy films wi ...