Alain Yuji Takabayashi

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Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and ...

Like integrated electronics, integrated photonics such as Silicon Photonics benefit from increased device-density on a single chip. Silicon is an excellent material for integrated photonics because its high refractive index allows devices to be made small, ...

A new electro‐optic phase shifter device architecture consisting of two lateral rail electrodes in doped silicon close to a waveguide with a liquid crystal cladding is demonstrated. Starting with a completed silicon photonics wafer of IMEC's iSiPP50G platf ...

Nanoelectromechanical (NEM) switches have the advantages of zero leakage current, abrupt switching characteristics, and harsh environmental capabilities. This makes them a promising component for digital computing circuits when high energy efficiency under ...

Photonic add-drop filters are crucial components for the implementation of wavelength division multiplexing (WDM) in fiber-optic communication systems. The recent progress in photonic integration has shown the potential to integrate photonic add-drop filte ...

Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero off-state leakage. Further, realizing circuits with 4-terminal (4-T) NEM rel ...

In this work, we analyze the effect of CF4/O-2 plasma treatment on the contact interface between the amorphous Indium-Gallium-Zinc-Oxide (a-IGZO) semiconductor and Titanium-Gold electrodes. First, the influence of CF4/O-2 plasma treatment is evaluated usin ...

The emerging fields of silicon (Si) photonic micro-electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable c ...

The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This rev ...

Photonic integrated circuits are becoming increasingly more complex, especially with the emergence of programmable photonic circuits. These require many tunable photonic elements, such as electro-optic phase shifters and tunable couplers. We will discuss o ...

Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS pi-pha ...

Low-power and compact phase shifters are crucial for large photonic circuits, both to cope with variability and to create programmable waveguide circuits scaling to thousands of tuning elements. This work demonstrates a liquid crystal phase shifter where a ...

Silicon (Si) photonic micro-electro-mechanical systems (MEMS), with its low-power phase shifters and tunable couplers, is emerging as a promising technology for large-scale reconfigurable photonics with potential applications for example in photonic accele ...

In the European project MORPHIC we develop a platform for programmable silicon photonic circuits enabled by waveguide-integrated micro-electro-mechanical systems (MEMS). MEMS can add compact, and low-power phase shifters and couplers to an established sili ...

Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with t ...

Photonic Integrated Circuits (PICs) benefit from the technology advances in the semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip to create large-scale photonic integrated circuits. We here present a br ...

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits pr ...

Programmable photonics promise a plethora of optical functions while at the same time reducing the time and costs of photonic integrated circuit (PIC) development. One primary bottleneck for development of these systems is the difficulty in increasing comp ...

Programmable photonic integrated circuits are emerging as an attractive platform for applications such as quantum information processing and artificial neural networks. However, current programmable circuits are limited in scalability by the lack of low-po ...

Integrated microring resonators are well suited for wavelength-filtering applications in optical signal processing, and cascaded microring resonators allow flexible filter design in coupledresonator optical waveguide (CROW) configurations. However, the imp ...

Alain Yuji Takabayashi

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Integrated silicon photonic MEMS

Integration of MEMS in Silicon Photonics

Efficient Low‐Voltage Phase Shifter with Inkjet‐Printed Liquid Crystal on a Silicon on Insulator Platform

Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Improvement of contact resistance in flexible a-IGZO thin-film transistors by CF4/O-2 plasma treatment

Wafer-level hermetically sealed silicon photonic MEMS

MEMS for Photonic Integrated Circuits

Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits

A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits

Low power optical phase shifter using liquid crystal actuation on a silicon photonics platform

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Compact Integrated Silicon Photonic Mems Power Coupler For Programmable Photonics

Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Fully reconfigurable MEMS-based second-order coupled-resonator optical waveguide (CROW) with ultra-low tuning energy