Ramin Matloub Aghdam

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Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the po ...

We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct ...

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Ramin Matloub Aghdam

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Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Resonant Pzt Mems Mirror With Segmented Electrodes

Growth and properties of AlScN thin films for microwave transducers and piezoelectric energy harvesting

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces