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Toralf Scharf

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Related publications (106)

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A Self-Organized Anisotropic Liquid-Crystal Plasmonic Metamaterial

Toralf Scharf

A composite material that leads to self organization of mesogen-coated gold nanospheres is synthesized and shows enhanced anisotropic optical properties due to synergistic effects of the mesogens intrinsic birefringence and its ability to drive the self-as ...

Wiley-Blackwell2013

Enabling proximity mask-aligner lithography with a 193nm CW light source

Toralf Scharf, Wilfried Noell, Raoul Kirner

We introduce a novel industrial grade 193nm continuous-wave laser light source for proximity mask-aligner lithography. A diode seed laser in master-oscillator power-ampliﬁcation conﬁguraton is frequency-quadrupled using lithiumtriborate and potassium-ﬂuoro ...

2018

Lightfields behind amplitude masks: Creating phase discontinuities

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Myun Sik Kim, Krishnaparvathy Puthankovilakam

Shaping of light fields behind amplitude and phase masks the basis the lithographic structure reproduction. The aerial image or better the intensity distribution defines the resolution of the structure to be printed. Contrast is the main parameter and to a ...

Ieee2016

Switchable photonic crystal cavity by liquid crystal infiltration

Hans Peter Herzig, Toralf Scharf, Vincent Paeder, Armando Cosentino, Qing Tan, Pierre-Yves Baroni

We report on the fabrication and optical characterization of a switchable photonic crystal nanocavity actuated by liquid crystals. This device acts as a filter presenting a transmission peak around the telecom wavelength λ = 1550 nm. Passing from the isotr ...

European Optical Society2010

Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim, Ali Naqavi, Krishnaparvathy Puthankovilakam

We try to find out the details of how light fields behind the structures of photomasks develop in order to determine the best conditions and designs for proximity printing. The parameters that we use approach real situations like structure printing at prox ...

SPIE-Intl Soc Optical Eng2016

Coherence management in lithography printing systems

Hans Peter Herzig, Toralf Scharf, Johana Bernasconi

In proximity lithography, interference and diffraction effects arise when printing small features because of the proximity gap. Different techniques are used in order to control and take advantage of theses effects. In this paper, the focus is set on the M ...

Spie-Int Soc Optical Engineering2016

Surface micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Hans Peter Herzig, Toralf Scharf, Karin Prater

Glassy carbon is used nowadays for a variety of applications because of its mechanical strength, thermal stability and non-sticking adhesion properties. This makes it also a suitable candidate as mold material for precision compression molding of low and h ...

Spie-Int Soc Optical Engineering2014

Diffractive Optical Elements Investigation in the Phase Domain

Toralf Scharf, Myun Sik Kim, Dong Cheon Kim, Michail Symeonidis

In this work we demonstrate the advantages of investigating diffractive optical elements in the phase domain. In this regime we can detect features that are not restrained by the diffraction limit and relate them to the geometrical and optical properties o ...

SPIE-INT SOC OPTICAL ENGINEERING2019

Refraction and interference in micro- and nanostructure optical elements

Hans Peter Herzig, Toralf Scharf

2008

Improving the resolution in mask-aligner lithography

Toralf Scharf, Wilfried Noell, Raoul Kirner

For the back-end microfabrication in integrated circuits and for the manufacturing of light emitting diodes, proximity mask-aligner lithography is still the tool of choice, due to its simplicity and low costs. However, the downscaling of functional element ...

IEEE2018

A self-assembled three-dimensional cloak in the visible

Mohamed Farhat, Toralf Scharf

An invisibility cloak has been designed, realized and characterized. The cloak hides free-standing sub-wavelength three-dimensional objects at the short wavelength edge of the visible spectrum. By a bottom-up approach the cloak was self-assembled around th ...

Nature Publishing Group2013

Fabrication and characterization of linear diffusers based on concave micro lens arrays

Nico de Rooij, Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Roland Andreas Bitterli

We present a new approach of beam homogenizing elements based on a statistical array of concave cylindrical microlens arrays. Those elements are used to diffuse light in only one direction and can be employed together with fly’s eye condensers to generate ...

Optical Society of America2010

Experimental demonstration of ray-optical refraction with confocal lenslet arrays

Toralf Scharf

We observe imaging through windows comprising pairs of confocal lenslet arrays that have different focal lengths but that are otherwise identical. Image space is stretched in the longitudinal direction only. Such windows are examples of METATOYs, optical c ...

Optical Society of America2010

Observation of Axial Phase Evolution of Highly Confined Light Fields

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim

Highly confined light fields demonstrate peculiar phase features, e.g., Gouy phase anomaly. Longitudinal-differential phase measurements by a high-resolution interference microscope are applied to investigate phase evolutions of confined light fields for p ...

2011

Liquid-Crystalline Thiol- and Disulfide-Based Dendrimers for the Functionalization of Gold Nanoparticles

Toralf Scharf

Wiley-VHCA AG2008

Measurements of light fields emerging from fine amplitude gratings

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim

High resolution amplitude and phase of light fields emerging from a 2-μm-period amplitude grating are measured for different wavelengths. The amplitude gratings lead to highly periodic patterns caused by the Talbot effect. Such patterns reach periodicities ...

2010

Interferometric study on Gouy phase anomaly of microlens array

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Myun Sik Kim

We investigate the Gouy phase anomaly of light in the focus of refractive plano-convex microlens arrays by using longitudinal-differential (LD) interferometry and a finite-difference time-domain (FDTD) simulation. We put emphasis on determining the amount ...

Spie-Int Soc Optical Engineering2015

Field of view extension using satellite pinhole cameras

Hans Peter Herzig, Toralf Scharf

An approach to extend the field of view of a miniaturised imaging system is introduced. This innovative approach uses multiple optical systems working in parallel and image post-processing. As an example, a module consisting of a central single micro-lens ...

2010

Tunable cavity-coupled plasmonic perfect absorber for ultra-compact thermo-optical switching

Olivier Martin, Toralf Scharf, Shourya Dutta Gupta

2015

High resolution displacement detection with speckles

Hans Peter Herzig, Toralf Scharf

2009