Publications by Terunobu Akiyama

Related publications (15)

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Nico de Rooij, Terunobu Akiyama, Peter Van der Wal, Sebastian Gautsch, Yexian Wu

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Elsevier2014

Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Sebastian Gautsch, Frédéric Loizeau

A fabrication process for realising two-dimensional cantilever arrays for parallel force spectroscopy of biological samples is presented. The parallel optical atomic force microscopy readout system has been developed and presented elsewhere. The arrays are ...

2012

High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS

Nico de Rooij, Danick Briand, Terunobu Akiyama, Rokhaya Gueye

A System-in-Package (SiP) concept for the 3D-integration of a Single Wall Carbon Nanotube (SWCNT) resonator with its CMOS driving electronics is presented. The key element of this advanced SiP is the monolithic 3D-integration of the MEMS with the CMOS elec ...

SPIE - International Society of Optical Engineering2013

Membrane-Type Surface Stress Sensor with Piezoresistive Readout

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Sebastian Gautsch, Frédéric Loizeau

We present the fabrication and characterization of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 mu m and a thickness of 2.5 mu m ...

Elsevier Science Bv2012

DIII-D research towards establishing the scientific basis for future fusion reactors

Yi Wang, Olivier Sauter, Richard Pitts, Sun Hee Kim, Wilfred Anthony Cooper, Terunobu Akiyama, Federico David Halpern, Mario Ludovico Podesta, Francesca Maria Poli, Jeffrey Huang, Alessandro Bortolon, Alessandro Marinoni, Gabriele Merlo, Dongbin Zhao, Fang Liu, Zhixian Yan, Stefan Müller, Wei Wu, Kyungjin Kim, Tzu-Hsien Shen, Lorenzo Anton-Louis Talà, Xi Chen, Gang Yu, Xin Yang, Shouguo Wang, Luc Nicolas Xuan Zeng, Sung Chul Park, Fang Wang

DIII-D research is addressing critical challenges in preparation for ITER and the next generation of fusion devices through focusing on plasma physics fundamentals that underpin key fusion goals, understanding the interaction of disparate core and boundary ...

IOP Publishing Ltd2019

Sub-ppm detection of vapors using piezoresistive microcantilever array sensors

Terunobu Akiyama, Peter Vettiger

The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that pie ...

2009

Piezoresistive Membrane Surface Stress Sensors for Characterization of Breath Samples of Head and Neck Cancer Patients

Terunobu Akiyama, Frédéric Loizeau, Pedro Romero

For many diseases, where a particular organ is affected, chemical by-products can be found in the patient's exhaled breath. Breath analysis is often done using gas chromatography and mass spectrometry, but interpretation of results is difficult and time-co ...

Mdpi Ag2016

In-Plane Fabricated Insulated Gold-Tip Probe For Electrochemical And Molecular Experiments

Nico de Rooij, Terunobu Akiyama, Peter Van der Wal, Sebastian Gautsch, Yexian Wu

In this contribution we present a scanning probe with a gold-tip completely encapsulated with insulator all the way to the apex. The probe fabrication is unique owing to an in-plane arrangement in which the width of the cantilever is defined by deep reacti ...

IEEE2013

Electrochemical coating stress sensor, apparatus and method for accurately monitoring and controlling electrochemical reactions and material coating

Terunobu Akiyama

The present invention relates to an electrochemical coating stress sensor comprising a stress member for receiving an electrochemical coating layer; a support frame supporting the stress member; at least two bridging portions separating the stress member f ...

2015

Extension of operation regimes and investigation of three-dimensional currentless plasmas in the Large Helical Device

Wilfred Anthony Cooper, Terunobu Akiyama

The progress of physical understanding as well as parameter improvement of net-current-free helical plasma is reported for the Large Helical Device since the last Fusion Energy Conference in Daejeon in 2010. The second low-energy neutral beam line was inst ...

IOP Publishing Ltd2013

Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip-One-Channel Setup

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Sebastian Gautsch, Frédéric Loizeau

With their capability for real-time and label-free detection of targets ranging from gases to biological molecules, nanomechanical sensors are expected to contribute to various fields, such as medicine, security, and environmental science. For practical ap ...

American Chemical Society2013

The measurement of biomechanical properties of porcine articular cartilage using atomic force microscopy

Nico de Rooij, Terunobu Akiyama

We have recently demonstrated that indentation-type atomic force microscopy (IT-AFM) is capable of detecting early onset osteoarthritis (OA) (Stolz, 2009). This study was based on biopsies, using a desk-top commercial atomic force microscope (AFM). However ...

Japan Society of Histological Documentation / International Society of Histology and Cytology2011

Piezoresistive Membrane-Type Surface Stress Sensor Arranged In Arrays For Cancer Diagnosis Through Breath Analysis

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Sebastian Gautsch, Frédéric Loizeau

We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 5 0 ...

IEEE2013

Sic high temperature pressure transducer

Terunobu Akiyama

The invention concerns a pressure transducer comprising a deflecting membrane, said membrane comprising two piezoresistors (10, 11) of different types, said piezoresistors being arranged such that a same stress or a same strain is applied on said piezoresi ...

2014

Batch fabrication of gold-gold nanogaps by E-beam lithography and electrochemical deposition

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Yexian Wu

We report on the successful development of a well-controlled two-step batch nano-fabrication process to achieve nanometer-size gaps at the wafer scale. The technique is based on an optimized electron-beam lithography process, which enables the fabrication ...

Institute of Physics2013