Montserrat Fernandez-Bolanos Badia

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Related publications (45)

Thermally Stable Distributed MEMS Phase Shifter for Airborne and Space Applications

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia

This paper presents an in-depth study of the design, modelling, circuit parameter extraction and characterization of a distributed MEMS digital microwave phase shifter. Bridge-type digital capacitors periodically loaded on a 5 mm CPW (with an actuation vol ...

2008

Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor

Didier Bouvet, Vincent Pott, Mihai Adrian Ionescu, Georges-André Racine, Nicolas Abelé, Montserrat Fernandez-Bolanos Badia

This paper reports on the fabrication and electrical characterization of a novel pressure sensor based on a suspended-gate MOSFET (SG-MOSFET) using a new polyimide process. The device is composed of a SG-MOSFET built on a thin SOI membrane released by a ba ...

Elsevier2006

MEMS Capacitive Pressure Sensor Based on Polysilicon Sealed Membrane

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia

This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pre ...

2006

AlSi-based Resonant Suspended-Gate MOSFET

Raphaël Fritschi, Mihai Adrian Ionescu, Nicolas Abelé, Montserrat Fernandez-Bolanos Badia

2005

Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor

Didier Bouvet, Vincent Pott, Mihai Adrian Ionescu, Georges-André Racine, Nicolas Abelé, Montserrat Fernandez-Bolanos Badia

2005

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