Publications by Fabio Jutzi | EPFL Graph Search

Related publications (5)

Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 2. Thermal property and sensitivity

This is the second part of two articles reporting investigation on a thermal-detector-type far-infrared sensor operating in the 8–14 µm wavelength region using Low-Pressure Chemical Vapor Deposition (LPCVD) deposited low-stress Si-rich nitride (SiN) membra ...

Elsevier2009

Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity

Nico de Rooij, Fabio Jutzi

This is the first part of the two articles reporting investigation of a thermal detector-type far-infrared sensor operating in the 8–14µm wavelength, using Low-Pressure-Chemical-Vapor-Deposition (LPCVD)- deposited low-stress Si-rich nitride (SiN)membrane a ...

2009

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Fabio Jutzi

In this thesis the concept, modelling, design, fabrication process and characterization of novel optical modulators are presented. The devices consist of flaps exhibiting a large tilt with electrostatic actuation at low voltages. The applications comprise, ...

EPFL2012

Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper

Nico de Rooij, Wilfried Noell, Luigi Bonacina, Jérôme Extermann, Sébastien Lani, Fabio Jutzi

We describe the performance of a reflective pulse-shaper based on a Micro-ElectroMechanical System (MEMS) linear mirror array. It represents a substantial upgrade of a preceding release [Opt. Lett. 35, 3102 (2010)] as it allows simultaneous piston and tilt ...

Optical Society of America2011

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Nico de Rooij, Wilfried Noell, Luigi Bonacina, Jérôme Extermann, Sébastien Lani, Fabio Jutzi

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb ...

American Institute of Physics2011