Andrea Feltrin

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Related publications (23)

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LATEST DEVELOPMENTS ON MICROMORPH TANDEM CELLS AT IMT

Christophe Ballif, Matthieu Despeisse, Andrea Feltrin, Gaetano Parascandolo, Grégory Bugnon

The latest developments on micromorph tandem cells in small area laboratory and large area industrial PE-CVD systems are reviewed. We report on a 13.3% initial efficiency micromorph tandem cell deposited in our small area system. The development of an in-s ...

2009

Microcrystalline and micromorph device improvements through combined plasma and material characterization techniques

Christophe Ballif, Andrea Feltrin, Benjamin Strahm, Grégory Bugnon, Gaetano Parascandolo

Hydrogenated microcrystalline silicon (μc-Si:H) growth by very high frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) is studied in an industrial-type parallel plate KAI reactor. Combined plasma and material characterization techniques allow ...

Elsevier B.V Amsterdam2011

Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films

Christophe Ballif, Andrea Feltrin

The silane dissociation efficiency, or depletion fraction, is an important plasma parameter by means of which the film growth rate and the amorphous-to-microcrystalline silicon transition regime can be monitored in situ. In this letter we implement a homeb ...

AIP American Institute of Physics2009