Lecture

Electron Beam Lithography: Interactions

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Description

This lecture discusses the electron-sample interactions in electron beam lithography, focusing on the distribution of electrons hitting the surface and the impact of different voltages on forward scattering and resolution. It also covers the proximity effect caused by backscattered electrons.

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Related concepts (7)

Scanning electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Electron diffraction

Electron diffraction refers to changes in the direction of electron beams due to interactions with atoms. Close to the atoms the changes are described as Fresnel diffraction; far away they are called Fraunhofer diffraction. The resulting map of the directions of the electrons far from the sample (Fraunhofer diffraction) is called a diffraction pattern, see for instance Figure 1. These patterns are similar to x-ray and neutron diffraction patterns, and are used to study the atomic structure of gases, liquids, surfaces and bulk solids.

Proximity sensor

A proximity sensor is a sensor able to detect the presence of nearby objects without any physical contact. A proximity sensor often emits an electromagnetic field or a beam of electromagnetic radiation (infrared, for instance), and looks for changes in the field or return signal. The object being sensed is often referred to as the proximity sensor's target. Different proximity sensor targets demand different sensors. For example, a capacitive proximity sensor or photoelectric sensor might be suitable for a plastic target; an inductive proximity sensor always requires a metal target.

Proximity fuze

A proximity fuze (or fuse) is a fuze that detonates an explosive device automatically when it approaches within a certain distance of its target. Proximity fuzes are designed for elusive military targets such as airplanes and missiles, as well as ships at sea and ground forces. This sophisticated trigger mechanism may increase lethality by 5 to 10 times compared to the common contact fuze or timed fuze. Before the invention of the proximity fuze, detonation was induced by direct contact, a timer set at launch, or an altimeter.

Related concepts (7)

Scanning electron microscope

Transmission electron microscopy

Electron diffraction

Proximity sensor

Proximity fuze