Chemical vapor depositionChemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
Field electron emissionField electron emission, also known as field emission (FE) and electron field emission, is emission of electrons induced by an electrostatic field. The most common context is field emission from a solid surface into a vacuum. However, field emission can take place from solid or liquid surfaces, into a vacuum, a fluid (e.g. air), or any non-conducting or weakly conducting dielectric. The field-induced promotion of electrons from the valence to conduction band of semiconductors (the Zener effect) can also be regarded as a form of field emission.
Electron-beam physical vapor depositionElectron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.
Ionized-air glowIonized-air glow is the luminescent emission of characteristic blue–purple–violet light, often of a color called electric blue, by air subjected to an energy flux either directly or indirectly from solar radiation. When energy is deposited to air, the air molecules become excited. As air is composed primarily of nitrogen and oxygen, excited N2 and O2 molecules are produced. These can react with other molecules, forming mainly ozone and nitrogen(II) oxide.
Photon countingPhoton counting is a technique in which individual photons are counted using a single-photon detector (SPD). A single-photon detector emits a pulse of signal for each detected photon. The counting efficiency is determined by the quantum efficiency and the system's electronic losses. Many photodetectors can be configured to detect individual photons, each with relative advantages and disadvantages. Common types include photomultipliers, geiger counters, single-photon avalanche diodes, superconducting nanowire single-photon detectors, transition edge sensors, and scintillation counters.
Neutron detectionNeutron detection is the effective detection of neutrons entering a well-positioned detector. There are two key aspects to effective neutron detection: hardware and software. Detection hardware refers to the kind of neutron detector used (the most common today is the scintillation detector) and to the electronics used in the detection setup. Further, the hardware setup also defines key experimental parameters, such as source-detector distance, solid angle and detector shielding.
Ion sourceAn ion source is a device that creates atomic and molecular ions. Ion sources are used to form ions for mass spectrometers, optical emission spectrometers, particle accelerators, ion implanters and ion engines. Electron ionization Electron ionization is widely used in mass spectrometry, particularly for organic molecules. The gas phase reaction producing electron ionization is M{} + e^- -> M^{+\bullet}{} + 2e^- where M is the atom or molecule being ionized, e^- is the electron, and M^{+\bullet} is the resulting ion.
ScintillatorA scintillator ('sɪntɪleɪtər ) is a material that exhibits scintillation, the property of luminescence, when excited by ionizing radiation. Luminescent materials, when struck by an incoming particle, absorb its energy and scintillate (i.e. re-emit the absorbed energy in the form of light). Sometimes, the excited state is metastable, so the relaxation back down from the excited state to lower states is delayed (necessitating anywhere from a few nanoseconds to hours depending on the material).
Delta rayA delta ray is a secondary electron with enough energy to escape a significant distance away from the primary radiation beam and produce further ionization, and is sometimes used to describe any recoil particle caused by secondary ionization. The term was coined by J. J. Thomson. A delta ray is characterized by very fast electrons produced in quantity by alpha particles or other fast energetic charged particles knocking orbiting electrons out of atoms.
Scanning electron microscopeA scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.
Spectrum (physical sciences)In the physical sciences, the term spectrum was introduced first into optics by Isaac Newton in the 17th century, referring to the range of colors observed when white light was dispersed through a prism. Soon the term referred to a plot of light intensity or power as a function of frequency or wavelength, also known as a spectral density plot. Later it expanded to apply to other waves, such as sound waves and sea waves that could also be measured as a function of frequency (e.g., noise spectrum, sea wave spectrum).
Synchrotron radiationSynchrotron radiation (also known as magnetobremsstrahlung radiation) is the electromagnetic radiation emitted when relativistic charged particles are subject to an acceleration perpendicular to their velocity (a ⊥ v). It is produced artificially in some types of particle accelerators or naturally by fast electrons moving through magnetic fields. The radiation produced in this way has a characteristic polarization, and the frequencies generated can range over a large portion of the electromagnetic spectrum.
