MEMSMEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.
SensorA sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends the information to other electronics, frequently a computer processor. Sensors are used in everyday objects such as touch-sensitive elevator buttons (tactile sensor) and lamps which dim or brighten by touching the base, and in innumerable applications of which most people are never aware.
Crystalline siliconCrystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconducting material used in photovoltaic technology for the production of solar cells. These cells are assembled into solar panels as part of a photovoltaic system to generate solar power from sunlight. In electronics, crystalline silicon is typically the monocrystalline form of silicon, and is used for producing microchips.
Polycrystalline siliconPolycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry. Polysilicon is produced from metallurgical grade silicon by a chemical purification process, called the Siemens process. This process involves distillation of volatile silicon compounds, and their decomposition into silicon at high temperatures. An emerging, alternative process of refinement uses a fluidized bed reactor.
Monocrystalline siliconMonocrystalline silicon, more often called single-crystal silicon, in short mono c-Si or mono-Si, is the base material for silicon-based discrete components and integrated circuits used in virtually all modern electronic equipment. Mono-Si also serves as a photovoltaic, light-absorbing material in the manufacture of solar cells. It consists of silicon in which the crystal lattice of the entire solid is continuous, unbroken to its edges, and free of any grain boundaries (i.e. a single crystal).
Semiconductor device fabricationSemiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.
Amorphous siliconAmorphous silicon (a-Si) is the non-crystalline form of silicon used for solar cells and thin-film transistors in LCDs. Used as semiconductor material for a-Si solar cells, or thin-film silicon solar cells, it is deposited in thin films onto a variety of flexible substrates, such as glass, metal and plastic. Amorphous silicon cells generally feature low efficiency.
Semiconductor fabrication plantIn the microelectronics industry, a semiconductor fabrication plant (commonly called a fab; sometimes foundry) is a factory for semiconductor device fabrication. Fabs require many expensive devices to function. Estimates put the cost of building a new fab over one billion U.S. dollars with values as high as 3–4billionnotbeinguncommon.TSMCinvested9.3 billion in its Fab15 300 mm wafer manufacturing facility in Taiwan. The same company estimations suggest that their future fab might cost $20 billion. Gauge fixingIn the physics of gauge theories, gauge fixing (also called choosing a gauge) denotes a mathematical procedure for coping with redundant degrees of freedom in field variables. By definition, a gauge theory represents each physically distinct configuration of the system as an equivalence class of detailed local field configurations. Any two detailed configurations in the same equivalence class are related by a gauge transformation, equivalent to a shear along unphysical axes in configuration space.
Gauge theoryIn physics, a gauge theory is a field theory in which the Lagrangian is invariant under local transformations according to certain smooth families of operations (Lie groups). The term gauge refers to any specific mathematical formalism to regulate redundant degrees of freedom in the Lagrangian of a physical system. The transformations between possible gauges, called gauge transformations, form a Lie group—referred to as the symmetry group or the gauge group of the theory. Associated with any Lie group is the Lie algebra of group generators.
Product (mathematics)In mathematics, a product is the result of multiplication, or an expression that identifies objects (numbers or variables) to be multiplied, called factors. For example, 21 is the product of 3 and 7 (the result of multiplication), and is the product of and (indicating that the two factors should be multiplied together). When one factor is an integer, the product is called a multiple. The order in which real or complex numbers are multiplied has no bearing on the product; this is known as the commutative law of multiplication.
Direct productIn mathematics, one can often define a direct product of objects already known, giving a new one. This generalizes the Cartesian product of the underlying sets, together with a suitably defined structure on the product set. More abstractly, one talks about the , which formalizes these notions. Examples are the product of sets, groups (described below), rings, and other algebraic structures. The product of topological spaces is another instance. There is also the direct sum – in some areas this is used interchangeably, while in others it is a different concept.
Cartesian productIn mathematics, specifically set theory, the Cartesian product of two sets A and B, denoted A × B, is the set of all ordered pairs (a, b) where a is in A and b is in B. In terms of set-builder notation, that is A table can be created by taking the Cartesian product of a set of rows and a set of columns. If the Cartesian product rows × columns is taken, the cells of the table contain ordered pairs of the form (row value, column value).
Empty productIn mathematics, an empty product, or nullary product or vacuous product, is the result of multiplying no factors. It is by convention equal to the multiplicative identity (assuming there is an identity for the multiplication operation in question), just as the empty sum—the result of adding no numbers—is by convention zero, or the additive identity. When numbers are implied, the empty product becomes one. The term empty product is most often used in the above sense when discussing arithmetic operations.
LidarLidar (ˈlaɪdɑːr, also LIDAR, LiDAR or LADAR, an acronym of "light detection and ranging" or "laser imaging, detection, and ranging") is a method for determining ranges by targeting an object or a surface with a laser and measuring the time for the reflected light to return to the receiver. LIDAR may operate in a fixed direction (e.g., vertical) or it may scan multiple directions, in which case it is known as LIDAR scanning or 3D laser scanning, a special combination of 3-D scanning and laser scanning.
AccelerometerAn accelerometer is a tool that measures proper acceleration. Proper acceleration is the acceleration (the rate of change of velocity) of a body in its own instantaneous rest frame; this is different from coordinate acceleration, which is acceleration in a fixed coordinate system. For example, an accelerometer at rest on the surface of the Earth will measure an acceleration due to Earth's gravity, straight upwards (by definition) of g ≈ 9.81 m/s2. By contrast, accelerometers in free fall (falling toward the center of the Earth at a rate of about 9.
ResistorA resistor is a passive two-terminal electrical component that implements electrical resistance as a circuit element. In electronic circuits, resistors are used to reduce current flow, adjust signal levels, to divide voltages, bias active elements, and terminate transmission lines, among other uses. High-power resistors that can dissipate many watts of electrical power as heat may be used as part of motor controls, in power distribution systems, or as test loads for generators.
InterferometryInterferometry is a technique which uses the interference of superimposed waves to extract information. Interferometry typically uses electromagnetic waves and is an important investigative technique in the fields of astronomy, fiber optics, engineering metrology, optical metrology, oceanography, seismology, spectroscopy (and its applications to chemistry), quantum mechanics, nuclear and particle physics, plasma physics, biomolecular interactions, surface profiling, microfluidics, mechanical stress/strain measurement, velocimetry, optometry, and making holograms.
MembraneA membrane is a selective barrier; it allows some things to pass through but stops others. Such things may be molecules, ions, or other small particles. Membranes can be generally classified into synthetic membranes and biological membranes. Biological membranes include cell membranes (outer coverings of cells or organelles that allow passage of certain constituents); nuclear membranes, which cover a cell nucleus; and tissue membranes, such as mucosae and serosae.
Silicon dioxideSilicon dioxide, also known as silica, is an oxide of silicon with the chemical formula , most commonly found in nature as quartz. In many parts of the world, silica is the major constituent of sand. Silica is one of the most complex and most abundant families of materials, existing as a compound of several minerals and as a synthetic product. Notable examples include fused quartz, fumed silica, silica gel, opal and aerogels. It is used in structural materials, microelectronics (as an electrical insulator), and as components in the food and pharmaceutical industries.
