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Lecture

Electromagnetic Actuation Schemes

In course

MICRO-470: Scaling laws in micro & nanosystems

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles. ...

Description

This lecture covers various electromagnetic actuation schemes, including current-current and current-magnet setups. It explores the reasons behind the constant current density hypothesis, addressing issues like heating and electro-migration. The presentation delves into scaling and simulation in MEMS, discussing the challenges and solutions in electromagnetics applications. Examples such as electrodynamic microbeam resonators and flexural plate wave resonators are analyzed, highlighting the principles of Lorentz forces and induced voltages. The lecture also examines practical applications like electromagnetic micro-mirrors and loudspeakers, showcasing the integration of electromagnetic principles in MEMS devices.

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Instructors (3)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Herbert Shea

Philippe Renaud

Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at EPFL. He is also the scientific director of the EPFL Center of MicroNanoTechnology (CMI). His main research area is related to micronano technologies in biomedical applications (BioMEMS) with emphasis on cell-chips, nanofluidics and bioelectronics. Ph. Renaud is invloved in many scientifics papers in his research area. He received his diploma in physics from the University of Neuchâtel (1983) and his Ph.D. degree from the University of Lausanne (1988). He was postdoctoral fellow at University of California, Berkeley (1988-89) and then at the IBM Zürich Research Laboratory in Switzerland (1990-91). In 1992, he joined the Sensors and Actuators group of the Swiss Center for Electronics and Microtechnology (CSEM) at Neuchâtel, Switzerland. He was appointed assistant professor at EPFL in 1994 and full professor in 1997. In summer 1996, he was visiting professor at the Tohoku University, Japan. Ph. Renaud is active in several scientific committee (scientific journals, international conferences, scientific advisory boards of companies, PhD thesis committee). He is also co-founder of the Nanotech-Montreux conference. Ph. Renaud is committed to valorization of basic research through his involvement in several high-tech start-up companies.

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Related concepts (19)

Lorentz force

In physics (specifically in electromagnetism), the Lorentz force (or electromagnetic force) is the combination of electric and magnetic force on a point charge due to electromagnetic fields. A particle of charge q moving with a velocity v in an electric field E and a magnetic field B experiences a force (in SI units) of It says that the electromagnetic force on a charge q is a combination of a force in the direction of the electric field E proportional to the magnitude of the field and the quantity of charge, and a force at right angles to the magnetic field B and the velocity v of the charge, proportional to the magnitude of the field, the charge, and the velocity.

Lorentz ether theory

What is now often called Lorentz ether theory (LET) has its roots in Hendrik Lorentz's "theory of electrons", which marked the end of the development of the classical aether theories at the end of the 19th and at the beginning of the 20th century. Lorentz's initial theory was created between 1892 and 1895 and was based on removing assumptions about aether motion. It explained the failure of the negative aether drift experiments to first order in v/c by introducing an auxiliary variable called "local time" for connecting systems at rest and in motion in the aether.

Lorentz transformation

In physics, the Lorentz transformations are a six-parameter family of linear transformations from a coordinate frame in spacetime to another frame that moves at a constant velocity relative to the former. The respective inverse transformation is then parameterized by the negative of this velocity. The transformations are named after the Dutch physicist Hendrik Lorentz.

Simulation

A simulation is the imitation of the operation of a real-world process or system over time. Simulations require the use of models; the model represents the key characteristics or behaviors of the selected system or process, whereas the simulation represents the evolution of the model over time. Often, computers are used to execute the simulation. Simulation is used in many contexts, such as simulation of technology for performance tuning or optimizing, safety engineering, testing, training, education, and video games.

History of Lorentz transformations

The history of Lorentz transformations comprises the development of linear transformations forming the Lorentz group or Poincaré group preserving the Lorentz interval and the Minkowski inner product . In mathematics, transformations equivalent to what was later known as Lorentz transformations in various dimensions were discussed in the 19th century in relation to the theory of quadratic forms, hyperbolic geometry, Möbius geometry, and sphere geometry, which is connected to the fact that the group of motions in hyperbolic space, the Möbius group or projective special linear group, and the Laguerre group are isomorphic to the Lorentz group.

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