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This lecture covers the kinetics of intrinsic defects in undoped films, focusing on annealing processes and saturation phenomena. It discusses the experimental methods to establish equilibrium defect densities at high temperatures, observe relaxation towards equilibrium, and the kinetics of light-induced defects. The lecture also explores exponential decay, stretched exponential kinetics, and the initial kinetics of light-induced defects. It presents a unified idea on defect kinetics, models for defect creation and annealing, and the variation of stretching parameters. Additionally, it delves into the annealing of light-induced defects and the kinetics of defect creation under continuous illumination. The lecture concludes with insights on the evolution of defect kinetics models and their applications in electronic materials.