MicrofabricationMicrofabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.
PhotoresistA photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronics industry. The process begins by coating a substrate with a light-sensitive organic material. A patterned mask is then applied to the surface to block light, so that only unmasked regions of the material will be exposed to light. A solvent, called a developer, is then applied to the surface.
Etching (microfabrication)Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
Solid-propellant rocketA solid-propellant rocket or solid rocket is a rocket with a rocket engine that uses solid propellants (fuel/oxidizer). The earliest rockets were solid-fuel rockets powered by gunpowder; they were used in warfare by the Chinese, Indians, Mongols and Persians as early as the 13th century. All rockets used some form of solid or powdered propellant up until the 20th century, when liquid-propellant rockets offered more efficient and controllable alternatives.
XerographyXerography is a dry photocopying technique. Originally called electrophotography, it was renamed xerography—from the n roots ξηρός xeros, meaning "dry" and -γραφία -graphia, meaning "writing"—to emphasize that unlike reproduction techniques then in use such as cyanotype, the process of xerography used no liquid chemicals. Xerography was invented by American physicist Chester Carlson, based significantly on contributions by Hungarian physicist Pál Selényi. Carlson applied for and was awarded on October 6, 1942.
PhotolithographyIn integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.
Space Shuttle Solid Rocket BoosterThe Space Shuttle Solid Rocket Booster (SRB) was the first solid-propellant rocket to be used for primary propulsion on a vehicle used for human spaceflight. A pair of these provided 85% of the Space Shuttle's thrust at liftoff and for the first two minutes of ascent. After burnout, they were jettisoned and parachuted into the Atlantic Ocean where they were recovered, examined, refurbished, and reused. The Space Shuttle SRBs were the most powerful solid rocket motors to ever launch humans.
Rocket propellantRocket propellant is the reaction mass of a rocket. This reaction mass is ejected at the highest achievable velocity from a rocket engine to produce thrust. The energy required can either come from the propellants themselves, as with a chemical rocket, or from an external source, as with ion engines. Rockets create thrust by expelling mass rear-ward, at high velocity. The thrust produced can be calculated by multiplying the mass flow rate of the propellants by their exhaust velocity relative to the rocket (specific impulse).
MicrolithographyMicrolithography is a general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, such as a silicon wafer, in order to protect selected areas of it during subsequent etching, deposition, or implantation operations. The term is normally used for processes that can reliably produce features of microscopic size, such as 10 micrometres or less. The term nanolithography may be used to designate processes that can produce nanoscale features, such as less than 100 nanometres.
Semiconductor device fabricationSemiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.
PhotocopierA photocopier (also called copier or copy machine, and formerly Xerox machine, the generic trademark) is a machine that makes copies of documents and other visual images onto paper or plastic film quickly and cheaply. Most modern photocopiers use a technology called xerography, a dry process that uses electrostatic charges on a light-sensitive photoreceptor to first attract and then transfer toner particles (a powder) onto paper in the form of an image. The toner is then fused onto the paper using heat, pressure, or a combination of both.
ElectrofaxAn electrofax was a type of fax. It involved electrostatic printer and copier technology, where an image was formed directly on the paper, instead of first on a drum, then transferred to paper, as it would be in xerography. It was used in the United States from the 1950s through the 1980s. The paper used in this process was coated with a zinc oxide powder, adhered with a resin, to make it able to hold an electrostatic charge, and absorb toner, to form an image and allow the evaporation of toner dispersants.
Semiconductor fabrication plantIn the microelectronics industry, a semiconductor fabrication plant (commonly called a fab; sometimes foundry) is a factory for semiconductor device fabrication. Fabs require many expensive devices to function. Estimates put the cost of building a new fab over one billion U.S. dollars with values as high as 3–4billionnotbeinguncommon.TSMCinvested9.3 billion in its Fab15 300 mm wafer manufacturing facility in Taiwan. The same company estimations suggest that their future fab might cost $20 billion. 65 nm processThe 65 nm process is an advanced lithographic node used in volume CMOS (MOSFET) semiconductor fabrication. Printed linewidths (i.e. transistor gate lengths) can reach as low as 25 nm on a nominally 65 nm process, while the pitch between two lines may be greater than 130 nm. For comparison, cellular ribosomes are about 20 nm end-to-end. A crystal of bulk silicon has a lattice constant of 0.543 nm, so such transistors are on the order of 100 atoms across. By September 2007, Intel, AMD, IBM, UMC and Chartered were also producing 65 nm chips.
3D printing3D printing or additive manufacturing is the construction of a three-dimensional object from a CAD model or a digital 3D model. It can be done in a variety of processes in which material is deposited, joined or solidified under computer control, with material being added together (such as plastics, liquids or powder grains being fused), typically layer by layer. In the 1980s, 3D printing techniques were considered suitable only for the production of functional or aesthetic prototypes, and a more appropriate term for it at the time was rapid prototyping.
Fused filament fabricationFused filament fabrication (FFF), also known as fused deposition modeling (with the trademarked acronym FDM), or filament freeform fabrication, is a 3D printing process that uses a continuous filament of a thermoplastic material. Filament is fed from a large spool through a moving, heated printer extruder head, and is deposited on the growing work. The print head is moved under computer control to define the printed shape.
Mercury-vapor lampA mercury-vapor lamp is a gas-discharge lamp that uses an electric arc through vaporized mercury to produce light. The arc discharge is generally confined to a small fused quartz arc tube mounted within a larger soda lime or borosilicate glass bulb. The outer bulb may be clear or coated with a phosphor; in either case, the outer bulb provides thermal insulation, protection from the ultraviolet radiation the light produces, and a convenient mounting for the fused quartz arc tube.
Equivalence principleIn the theory of general relativity, the equivalence principle is the equivalence of gravitational and inertial mass, and Albert Einstein's observation that the gravitational "force" as experienced locally while standing on a massive body (such as the Earth) is the same as the pseudo-force experienced by an observer in a non-inertial (accelerated) frame of reference. History of gravitational theory Something like the equivalence principle emerged in the early 17th century, when Galileo expressed experimentally that the acceleration of a test mass due to gravitation is independent of the amount of mass being accelerated.
Fluorescent lampA fluorescent lamp, or fluorescent tube, is a low-pressure mercury-vapor gas-discharge lamp that uses fluorescence to produce visible light. An electric current in the gas excites mercury vapor, which produces short-wave ultraviolet light that then causes a phosphor coating on the inside of the lamp to glow. A fluorescent lamp converts electrical energy into useful light much more efficiently than an incandescent lamp. The typical luminous efficacy of fluorescent lighting systems is 50–100 lumens per watt, several times the efficacy of incandescent bulbs with comparable light output.
Principle of relativityIn physics, the principle of relativity is the requirement that the equations describing the laws of physics have the same form in all admissible frames of reference. For example, in the framework of special relativity the Maxwell equations have the same form in all inertial frames of reference. In the framework of general relativity the Maxwell equations or the Einstein field equations have the same form in arbitrary frames of reference.
