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Lecture

Micro/Nanomechanical Devices: Fabrication Techniques

Related concepts (25)

Uniform space

In the mathematical field of topology, a uniform space is a topological space with additional structure that is used to define uniform properties, such as completeness, uniform continuity and uniform convergence. Uniform spaces generalize metric spaces and topological groups, but the concept is designed to formulate the weakest axioms needed for most proofs in analysis. In addition to the usual properties of a topological structure, in a uniform space one formalizes the notions of relative closeness and closeness of points.

Uniform convergence

In the mathematical field of analysis, uniform convergence is a mode of convergence of functions stronger than pointwise convergence. A sequence of functions converges uniformly to a limiting function on a set as the function domain if, given any arbitrarily small positive number , a number can be found such that each of the functions differs from by no more than at every point in .

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Semiconductor fabrication plant

In the microelectronics industry, a semiconductor fabrication plant (commonly called a fab; sometimes foundry) is a factory for semiconductor device fabrication. Fabs require many expensive devices to function. Estimates put the cost of building a new fab over one billion U.S. dollars with values as high as

3–4 billion not being uncommon. TSMC invested

9.3 billion in its Fab15 300 mm wafer manufacturing facility in Taiwan. The same company estimations suggest that their future fab might cost $20 billion.

Mechanical computer

A mechanical computer is a computer built from mechanical components such as levers and gears rather than electronic components. The most common examples are adding machines and mechanical counters, which use the turning of gears to increment output displays. More complex examples could carry out multiplication and division—Friden used a moving head which paused at each column—and even differential analysis. One model, the Ascota 170 accounting machine sold in the 1960s calculated square roots.