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Concept

Die (integrated circuit)

Related publications (25)

Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Martinus Adela Maria Gijs, Christophe Yamahata, Marc Stranczl

We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural ...

IEEE2011

Ambipolar silicon nanowire FETs with stenciled-deposited metal gate

Giovanni De Micheli, Yusuf Leblebici, Jürgen Brugger, Andreea Veronica Savu, Davide Sacchetto

We report on a fully CMOS compatible fabrication method for ambipolar silicon nanowire FinFETs. The low thermal budget processing, compatible with monolithic 3D device integration, makes use of low pressure chemical vapor deposition (LPCVD) of amorphous Si ...

Elsevier2011

Monolithic Silicon Chip for Immunofluorescence Detection on Single Magnetic Beads

Edoardo Charbon, Martinus Adela Maria Gijs, Caroline Vandevyver, Ulrike Lehmann, Emile Dupont

While fluorescence detection is widely used for bioassays owing to its high sensitivity, a complete fluorescent microscopy setup, comprised of a light source, optical filters, a microscope body, and a camera, still is bulky equipment, compromising its use ...

2010

Combining diamond electrodes with GaN heterostructures for harsh environment ISFETs

Nicolas Grandjean, Jean-François Carlin

Electrochemistry and biochemistry have always been ideal applications for diamond due to its chemical inertness and stability, sensitivity and biocompatibility. Several diamond ChemFET concepts have been proposed to date, however further improvements are s ...

2009

Micromachined electrospray thrusters for spacecraft propulsion

Micromachining has enabled the downscaling of large, massive and power hungry systems into small batch-produced integrated devices. Recent progress in electrospray thruster technology, in particular the discovery of an ionic emission mode using the ionic l ...

EPFL2009