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Concept

Foundry model

Related publications (27)

Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Herbert Shea, Amir Firouzeh, Edouard Franck Vincent Gustave Leroy

The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoco ...

SPRINGERNATURE2023

Integrated silicon photonic MEMS

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and ...

SPRINGERNATURE2023

Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

Photonic add-drop filters are crucial components for the implementation of wavelength division multiplexing (WDM) in fiber-optic communication systems. The recent progress in photonic integration has shown the potential to integrate photonic add-drop filte ...

SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS2022

Platicon microcomb generation using laser self-injection locking

Tobias Kippenberg, Junqiu Liu, Rui Ning Wang, Wenle Weng, Jijun He, Miles Henry Anderson

The past decade has witnessed major advances in the development and system-level applications of photonic integrated microcombs, that are coherent, broadband optical frequency combs with repetition rates in the millimeter-wave to terahertz domain. Most of ...

Nature Portfolio2022

Low and high frequency electromagnetic forces: numerical modelling and practical applications

Marco Riccardi

The understanding and manipulation of nanoscale analytes is a central theme in nanotechnology and has been one of the main driving forces behind the development of this field as we know it today. Furthermore, such a technology has the potential to also rev ...

EPFL2022

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Near-junction microfluidic cooling for high power-density GaN-on-Si electronics: A wafer, device, packaging, and system-level investigation

Remco Franciscus Peter van Erp

Electrification of the energy section, from generation to end-use, plays an essential role in reducing global CO2 emission. Innovations in power electronics are required to increase conversion efficiency and power density. Gallium nitride (GaN) transistors ...

EPFL2022

Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari

Programmable photonic integrated circuits are emerging as an attractive platform for applications such as quantum information processing and artificial neural networks. However, current programmable circuits are limited in scalability by the lack of low-po ...

OPTICAL SOC AMER2021

Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

Tobias Kippenberg, Junqiu Liu, Maxim Karpov, Rui Ning Wang, Jijun He, Wenle Weng, Arslan Sajid Raja, Guanhao Huang, Miles Henry Anderson, Anton Lukashchuk, Nils Johan Engelsen, Anat Siddharth, Mikhail Churaev, Alexey Tikan

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and qua ...

IEEE2020

Extending Boolean Methods for Scalable Logic Synthesis

Giovanni De Micheli, Mathias Soeken, Pierre-Emmanuel Julien Marc Gaillardon, Eleonora Testa, Luca Gaetano Amarù

In recent years, Boolean methods in logic synthesis have been drawing the attention of EDA researchers due to the continuous push to advance quality of results. Boolean methods require high computational cost, as they rely on complete functional properties ...

2020

Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers

Marco Mattavelli, Diego Ruben Barrettino

The designs fabrication and testing of low-cost readout electronics for piezoresistive MEMS-based transducers are presented in this paper. The proposed circuit architecture has a low input referred noise power spectral density of 60nV/root Hz a latency of ...

IEEE2019

A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom

Matthias Imboden

Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry process. The device has a large range of motion in X, Y, and Z (14.1 mu m in X and Y and 97.9 mu m in Z) and can also rotate about two axes (7.4 degrees), making it a 5 degre ...

Institute of Electrical and Electronics Engineers2019

5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

Microacoustic resonators made on suspended continuous membranes of LiNbO3 were recently shown to have very strong coupling and low losses at >= 5 GHz, suitable for high-performance filter design. Employing these simple resonator structures, the authors hav ...

2019

Three-Dimensional Integrated Ultra-Low-Volume Passive Microfluidics with Ion-Sensitive Field-Effect Transistors for Multiparameter Wearable Sweat Analyzers

Mihai Adrian Ionescu, Francesco Bellando, Hoël Maxime Guérin, Fabien Patrick Wildhaber, Erick Antonio Garcia Cordero, Junrui Zhang, Johan Frédéric Longo

Wearable systems could offer noninvasive and real-time solutions for monitoring of biomarkers in human sweat as an alternative to blood testing. Recent studies have demonstrated that the concentration of certain biomarkers in sweat can be directly correlat ...

2018

Trading off Energy versus Accuracy in Modern Computing Systems : From Digital Circuit Design to Programming Techniques

Jérémy Lucien Maurice Schlachter

The slowdown of Moore's law, which has been the driving force of the electronics industry over the last 5 decades, is causing serious problem to Integrated Circuits (ICs) improvements. Technology scaling is becoming more and more complex and fabrication co ...

EPFL2018

Enabling exact delay synthesis

Giovanni De Micheli, Pierre-Emmanuel Julien Marc Gaillardon, Mathias Soeken, Luca Gaetano Amarù

Given (i) a Boolean function, (ii) a set of arrival times at the inputs, and (iii) a gate library with associated delay values, the exact delay synthesis problem asks for a circuit implementation which minimizes the arrival time at the output(s). The exact ...

IEEE2017

Ultra-Low Power Ion-Sensing Smart Platform for Noninvasive Healthcare Applications

Mihai Adrian Ionescu, Francesco Bellando, Hoël Maxime Guérin, Erick Antonio Garcia Cordero

The development of nanotechnologies, and the advent of micro/nano-sensors with novel functionalities integrated on flexible substrates, has opened the way to the development of wearable technology. Interest in wearable technology comes from the considerabl ...

2016

Fine Pitch 3D-TSV Based High Frequency Components for RF MEMS Applications

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia, Wolfgang Amadeus Vitale

The development of interconnections suitable for radio- frequency (RF) and millimeter-wave (mm-wave) applications is of foremost importance for the feasibility of high-quality substrate-integrated devices. For this purpose, we introduce and validate the te ...

2015

Full Fabrication and Packaging of an Implantable Multi-panel Device for Monitoring of Metabolites in Small Animals

Giovanni De Micheli, Sandro Carrara, Catherine Dehollain, Camilla Baj-Rossi, Seyedeh Sara Ghoreishizadeh, Enver Gürhan Kilinç

In this work, we show the realization of a fully-implantable device for monitoring free-moving small animals. The device integrates a microfabricated sensing platform, a coil for power and data transmission and two custom designed integrated circuits. The ...

Ieee-Inst Electrical Electronics Engineers Inc2014

Polarity-Controllable Silicon Nanowire Transistors with Dual Threshold Voltages

Giovanni De Micheli, Yusuf Leblebici, Pierre-Emmanuel Julien Marc Gaillardon, Davide Sacchetto, Jian Zhang, Michele De Marchi

Gate-all-around (GAA) silicon nanowires enable an unprecedented electrostatic control on the semiconductor channel that can push device performance with continuous scaling. In modern electronic circuits, the control of the threshold voltage is essential fo ...

Institute of Electrical and Electronics Engineers2014