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Concept

Photomask

Related publications (28)

Lightfields behind amplitude masks: Creating phase discontinuities

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Myun Sik Kim, Krishnaparvathy Puthankovilakam

Shaping of light fields behind amplitude and phase masks the basis the lithographic structure reproduction. The aerial image or better the intensity distribution defines the resolution of the structure to be printed. Contrast is the main parameter and to a ...

Ieee2016

Fabrication defects and grating couplers in III-nitride photonic crystal nanobeam lasers (Conference Presentation)

Nicolas Grandjean, Jean-François Carlin, Raphaël Butté, Ian Michael Rousseau

We report a numerical and experimental investigation of fabrication tolerances and outcoupling in optically pumped III-nitride nanolasers operating near lambda = 460 nm, in which feedback is provided by a one-dimensional photonic crystal nanobeam cavity an ...

Spie-Int Soc Optical Engineering2016

Array imaging system for lithography

Toralf Scharf, Wilfried Noell, Raoul Kirner

We present an integrated array imaging system based on a stack of microlens arrays. The microlens arrays are manufactured by melting resist and reactive ion etching (RIE) technology on 8'' wafers (fused silica) and mounted by wafer-level packaging (WLP)(1) ...

Spie-Int Soc Optical Engineering2016

Post-cmos processing and 3d integration based on dry-film lithography

Yusuf Leblebici, Carlotta Guiducci, Yüksel Temiz

A method for performing a post processing pattern on a diced chip having a foot-print, comprises the steps of providing a support wafer; applying a first dry film photoresist to the support wafer; positioning a mask corresponding to the footprint of the di ...

2015

Engineered substrates with embedded strain relief for stretchable thin-film electronics

Alessia Romeo

Stretchable electronics are integrated circuitry that can reversibly expand and relax while retaining their functionality. This emerging technology has great potential in unconventional electronic application areas, especially in biomedical sector. To atta ...

EPFL2015

Fabrication and Characterization of 1-D diffusing elements

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim, Roland Andreas Bitterli

Certain high power laser applications require thin homogeneous laser lines. In this paper we describe the concept, fabrication and characterization of a 1-D diffuser that generates such a line. The device is based on an array of concave cylinder lenses wit ...

2009

Multilevel Micro-Structuring of Glassy Carbon for Precision Glass Molding of Diffractive Optical Elements

Hans Peter Herzig, Toralf Scharf, Karin Prater

A consumer market for diffractive optical elements in glass can only be created if high efficient elements are available at affordable prices. In diffractive optics the efficiency and optical properties increases with the number of levels used, but in the ...

Spie-Int Soc Optical Engineering2015

Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates

Nico de Rooij, Danick Briand, Francisco Molina Lopez, Jérôme Courbat

We have experimentally studied the variation in electrical resistance of flexible platinum lines patterned on polyimide foil when they are subjected to circular bending constraints. The lines were patterned by means of standard photolithography and sputter ...

Elsevier2014