Jürgen BruggerI am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Vivek SubramanianTeaching & PhD PhD Students Giovanni Ruffolo, Giada Romano, Sanjay Manoharan, Kyle Haas, Claude Dahan, Biruktait Ayele Lemecho, Yagmur Ceren Alatas, Tugçe Delipinar Past EPFL PhD Students Amin Hodaei, Mustafa Mohieldin Fadlelmula Fadlelseed Past EPFL PhD Students as codirector Mohammad Jafarpour Courses Organic and printed electronics MICRO-505 This course addresses the implementation of organic and printed electronics technologies using large area manufacturing techniques. It will provide
Chenxiang ZhangExpertise
full-process micro-fabrication, mechanical modelling
Current Work
IGZO transistor fabrication, stencil lithography
Education Master | MEMS designing, micro-plasma, micro-fabrication 2019 – 2022 Tsinghua University, Beijing, China Bachelor | Biomedical engineering, bio-electronics, machine learning 2015 – 2019 Beihang University, Beijing, China
Edoardo CharbonEdoardo Charbon (SM’00 F’17) received the Elektrotechnik Diploma from ETH Zurich, the M.S. from the University of California at San Diego, and the Ph.D. from the University of California at Berkeley in 1988, 1991, and 1995, respectively, all in electrical engineering and EECS. He has consulted with numerous organizations, including Bosch, X-Fab, Texas Instruments, Maxim, Sony, Agilent, and the Carlyle Group. He was with Cadence Design Systems from 1995 to 2000, where he was the architect of the company's initiative on information hiding for intellectual property protection. In 2000, he joined Canesta Inc., as the Chief Architect, where he led the development of wireless 3-D CMOS image sensors. Since 2002 he has been a member of the faculty of EPFL, where is a full professor since 2015. From 2008 to 2016 he was full professor and chair at the Delft University of Technology, where he spearheaded the university's effort on cryogenic electronics for quantum computing as part of QuTech. He has been the driving force behind the creation of deep-submicron CMOS SPAD technology, which is mass-produced since 2015 and is present in smartphones, telemeters, proximity sensors, and medical diagnostics tools. His interests span from 3-D vision, LiDAR, FLIM, FCS, NIROT to super-resolution microscopy, time-resolved Raman spectroscopy, and cryo-CMOS circuits and systems for quantum computing. He has authored or co-authored over 400 papers and two books, and he holds 23 patents. Dr. Charbon is a distinguished visiting scholar of the W. M. Keck Institute for Space at Caltech, a fellow of the Kavli Institute of Nanoscience Delft, a distinguished lecturer of the IEEE Photonics Society, and a fellow of the IEEE.
Cyrille HibertCyrille HIBERT received his diploma in Physics in 1994 and his PhD in 1998 from University of Orleans (FR). He then held a post doctoral position in GREMI laboratory at the University of Orleans in collaboration with Alcatel Vacuum Technology and ST Microelectronics, working in deep anisotropic etching of silicon with an Inductively Coupled Plasma reactor. In May 2000 he joined the EPFL-Center of Micro-Nano-technology where he was in charge of the plasma etching activities. He left EPFL in October 2003 for a sabbatical year to join the CFF group at NMRC (Ireland) now called Tyndall Institute. He worked on developing plasma processing. In October 2004, he came back to EPFL-CMI to be in charge of etching and nanotechnology activities (FIB and future ebeam litho).
Mihai Adrian IonescuAdrian M. Ionescu is Full Professor at the Swiss Federal Institute of Technology, Lausanne, Switzerland. He received the B.S./M.S. and Ph.D. degrees from the Polytechnic Institute of Bucharest, Romania and the National Polytechnic Institute of Grenoble, France, in 1989 and 1997, respectively. He has held staff and/or visiting positions at LETI-CEA, Grenoble, France and INP Grenoble, France and Stanford University, USA, in 1998 and 1999. Dr. Ionescu has published more than 600 articles in international journals and conferences. He received many Best Paper Awards in international conferences, the Annual Award of the Technical Section of the Romanian Academy of Sciences in 1994 and the Blondel Medal in 2009 for contributions to the progress in engineering sciences in the domain of electronics. He is the 2013 recipient of the IBM Faculty Award in Engineering. He served the IEDM and VLSI conference technical committees and was the Technical Program Committee (Co)Chair of ESSDERC in 2006 and 2013. He is a member of the SATW. He is director of the Laboratory of Micro/Nanoelectronic Devices (NANOLAB).
Nikunj DudaniExpertise
EngineeringSimulations - COMSOLAtmospheric Particles
Roger HerschRoger D. Hersch is professor of Computer Science and head of the Peripheral Systems Laboratory at EPFL. He received his engineering degree from ETHZ in 1975, worked in industry from 1975 to 1980, and obtained his PhD degree from EPFL in 1985. He directed the widely known
Visible Human Web Server project
, which offers a number of services for the visualization of human anatomy.
His current research focuses on color reproduction, spectral color prediction models, moiré imaging, and visual document security. Recent achievements include the PhotoProtect technology, which incorporates text as chromatic differences in order to protect identity photographs (Swiss driving license), microstructure imaging, which is used by railways companies (SNCF, RENFE) and festival organizers (Paleo) to print tickets at home and the band moire imaging technology for the protection of security documents.
Hans Peter HerzigDr. Hans Peter Herzig is Professor at the Ecole Polytechnique Fédérale de Lausanne (EPFL) and Past President of the European Optical Society (EOS). His current research interests include refractive and diffractive micro-optics, nano-scale optics and optical MEMS.
Hans Peter Herzig received his diploma in physics from the Swiss Federal Institute of Technology in Zürich, Switzerland, in 1978. From 1978 to 1982 he was a scientist with the Optics Development Department of Kern in Aarau, Switzerland, working in lens design and optical testing. In 1983, he became a graduate research assistant with the Applied Optics Group at the Institute of Microtechnology of the University of Neuchâtel, Switzerland, working in the field of holographic optical elements. In 1987, he received his PhD degree in optics. From 1989 to 2001 he was head of the micro-optics research group in Neuchâtel. From 2002 to 2008 he was a full professor and head of the Applied Optics Laboratory at the University of Neuchâtel. Professor Herzig joined the faculty at EPFL in January 2009.
He is member of OSA, IEEE Photonics Society and Fellow of EOS. 2009-2010 he was President of the European Optical Society (EOS), 2001-2009 Vice-President of the Swiss Society of Optics and Microscopy and 2012-2014 Vice-President of ICO. Dr. Herzig is in the editorial board of different scientific journals (JM3, Optical Review, JEOS). He served as Conference Chairman for international conferences of EOS, IEE, IEEE/LEOS, OSA and SPIE; and as Guest Editor of three special issues of IEEE, OSA journals. He is editor of a well-known book on micro-optics (published in English and Chinese), author of 14 book chapters, over 150 peer reviewed articles and 300 conference proceedings.
Simon HolzerHi, I am Simon Holzer. I received my B.Sc. and M.Sc. degrees in mechanical engineering with a focus on microtechnology from the Swiss Federal Institute of Technology Zurich (ETHZ) in 2020 and 2022, respectively. I am currently working towards Ph.D. in the Integrated Actuators Laboratory (LAI) at EPFL in Neuchâtel, Switzerland. My research interests lie in the field of soft robotics, artificial muscles, and biomechanics.
Yves PerriardYves Perriard was born in Lausanne in 1965. He received the M. Sc. in Microengineering from the Swiss Federal Institute of Technology - Lausanne (EPFL) in 1989 and the Ph D. degree in 1992. Co-founder of Micro-Beam SA, he was CEO of this company involved in high precision electric drive. Senior lecturer from 1998 and professor since 2003, he is currently director of Laboratory of Integrated Actuators. His research interests are in the field of new actuator design and associated electronic devices. In 2009, he is appointed Vice-Director of the Microengineering Institute in Neuchâtel until 2011. In 2013 the Federal Council has named him the the CTI commission in Bern. In 2014 he is appointed guest professor at Zhejiang University in China. In 2017, the lab is granted by the Werner Siemens Foundation of an amount of 12 millions CHF in order to set up a new Center for Artificial Muscules. Since 2018, he is Expert with Innosuisse, the new Swiss Innovation Agency. http://scholar.google.com/citations?hl=fr&user=V2onuO8AAAAJ https://actu.epfl.ch/news/a-12-million-franc-donation-to-create-a-center-for/ Yoan René Cyrille CivetTeaching & PhD PhD Students Simon Holzer Past EPFL PhD Students as codirector Dan Shi, Jasha Poliakine, Jonathan Chavanne, Quentin Philippe Mario De Menech Courses Electrotechnics I MICRO-100 The course covers the basics of electrical circuits composed of linear components, in direct current (DC) operation. A series of transforming methods are studied. At the end of the semester, alternate current (AC) systems are treated (complex numbers). Many examples and demos illustrate the course.
Hubert GiraultEducation: 1979 - Engineering diploma from Grenoble Institute of Technology. FRANCE. 1982 - PhD- Department of Chemistry, University of Southampton. Thesis entitled : Interfacial studies using drop image processing techniques. Positions : 1982 - 1984 SERC Research Fellow. University of Southampton. 1984 - 1985 CNRS Research Fellow. University of Southampton. 1985 - 1992 Lecturer in Physical Chemistry, University of Edinburgh. 1992 - Professor of Physical Chemistry, Ecole Polytechnique Fédérale de Lausanne. 2011 - 2014 Dean of Bachelor and Master studies Hubert Girault is the author of 2 textbooks, the co-author of about 600 scientific publications with more than 20'000 citations and the co-inventor of more than 15 patents. During his academic career, he has supervised 70 PhD students. 30 alumni of his laboratory are now Professors. Honours: Faraday medal 2006, Royal Society of Chemistry, Fellow of the International Society of Electrochemistry 2007, Reilley Award 2015. Fellow of the Electrochemical Society (USA), Shikata International medal, Polarography Society of Japan. Associate editor of Chemical Science
