The objective of this course is to expose students to the fundamentals of robotics at small scale. This includes a focus on physical laws that predominate at the nano and microscale, technologies for fabricating small devices, bioinspired design and contro ...
This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles. ...